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Molecular dynamics study of B₁₈H₂₂ cluster implantation into silicon

L. A. Marqués, L. Pelaz and I. Santos

Nuclear Instruments and Methods in Physics Research Section B 255, 242 (2007)

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Abstract:

We have carried out molecular dynamics simulations of monatomic B and octadecaborane cluster implantations into Si in order to make a comparative study and determine the advantages and drawbacks of each approach when used to fabricate shallow junctions. We have simulated a total of 1000 cascades of monatomic boron and an equivalent of 56 cascades of octadecaborane in order to have good statistics. We have obtained and analyzed the doping profiles and the amount and morphology of the damage produced within the target. Our simulation results indicate that the use of octadecaborane clusters for the implantation process shows several advantages with respect to monatomic B beams, mainly related to the reduction of channeling and the lower amount of residual damage at the end of range.

DOI: 10.1016/j.nimb.2006.11.038

PDF: Molecular dynamics study of B₁₈H₂₂ cluster implantation into silicon

Funded by:

• TEC2005-05101: Modeling and characterization of fabrication processes for next CMOS generations,
  
• VA070A05: Atomistic simulation of ion implantation and annealing for the fabrication of electronic devices for the 45nm technological node,
  

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