Assisted
Learning Tool
This
assisted learning tool can be used to understand the physical mechanisms of semiconductors.
It also explains basic steps in the use of DADOS, with the assistance of the UVAS-DADOS
Help system. This tutorial expounds some significant simulations to explain the
main manufacturing processes of MOSFET transistors in integrated circuits.
These simulations are divided by different subjects:
Extended Defects
Dopant Activation and Deactivation
· B Diffusion & Boron Interstitial Clusters (BICs)
Damage Model
Last
update: November 2007
This
tutorial has been developed by Daniel Argibay.
The UVAS-DADOS help
system was developed by L. M. Vega, and it is updated to 2006.
Comments
& suggestions about UVAS Tutorial: dargqui@ribera.tel.uva.es
Comments
& suggestions about DADOS: mjaraiz@ele.uva.es