Assisted Learning Tool

This assisted learning tool can be used to understand the physical mechanisms of semiconductors. It also explains basic steps in the use of DADOS, with the assistance of the UVAS-DADOS Help system. This tutorial expounds some significant simulations to explain the main manufacturing processes of MOSFET transistors in integrated circuits. These simulations are divided by different subjects:

Extended Defects

·         {311} Defects Dissolution

Dopant Activation and Deactivation

·         B Diffusion & Boron Interstitial Clusters (BICs)

Damage Model

·         Amorphization and EOR Defects

 


Last update: November 2007

This tutorial has been developed by Daniel Argibay.

The UVAS-DADOS help system was developed by L. M. Vega, and it is updated to 2006.

Comments & suggestions about UVAS Tutorial: dargqui@ribera.tel.uva.es

Comments & suggestions about DADOS: mjaraiz@ele.uva.es