Definition
Prefactor of recrystallization velocity.
Units
Centimeters per second (cm/s).
Related DADOS mechanisms
Definition
Activation energy for the recrystallization.
Units
Electron-volts (eV).
Related DADOS mechanisms
Definition
Probability that an impurity stays as a substitutional structure in an amorphous box which is going to recrystallize instead or being transferred into another amorphous box following the direction indicated by the recrystallization front.
Interrogation mark (?) is used to indicate the particle for which the parameter is defined, for instance, recrysDepositProb_As is the probability for arsenic.
Involved particles
Units
Dimensionless.
Related DADOS mechanisms
Definition
Maximum concentration of active impurities that can be deposited as complexes in an amorphous box which has recrystallized.
Interrogation mark (?) is used to indicate the particle for which the parameter is defined, for instance, recrysMaxActive_As is the maximum concentration of arsenic.
Involved particles
Units
Particles per cubic centimeters (cm-3).
Related DADOS mechanisms
Definition
Maximum number of atoms that can be included in a complex created from impurities deposit in an amorphous box which has recrystallized.
Interrogation mark (?) is used to indicate the particle for which the parameter is defined, for instance, maxDepositedCxSize_As is the maximum number of arsenic atoms in a complex in the recrystallization process.
Involved particles
Units
Dimensionless.
Related DADOS mechanisms
Definition
When the damage profile has been modified in a percentage indicated by this parameter, an update will take place.
Units
Dimensionless
Related DADOS mechanisms
Definition
Minimum level of interstitials plus vacancies concentration to consider a region to be amorphous. These particles can be point defects or belong to an amorphous pocket.
Units
Particles per cubic centimeter (cm-3).
Related DADOS mechanisms
Definition
Maximum level of interstitials plus vacancies concentration to store each particle's coordinates in memory. From this level, DADOS will only count the number of particles (Rubio et al. 2004).
Units
Particles per cubic centimeter (cm-3).
Related DADOS mechanisms
Comments
Obviously, if resources saving is wanted, MaxIVStorage must be lower than AmorphizationThreshold, due to the fact that over this concentration, silicon is transformed into amorphous silicon and no particles are stored for this material.
If the concentration is too low, DADOS will convert it into the minimum value, with is the equivalent to one particle per box size.
Definition
If a silicon region is surrounded by amorphous silicon and its volume is equal or lower than the one indicated by this parameter, it will amorphize. This avoids to have small non-amorphous regions which are a source of recrystallization.
Units
Cubic nanometers (nm3).
Related DADOS mechanisms
Definition
Exponent used for the activation energy calculation.
Units
Dimensionless.
Related DADOS mechanisms
Definition
Proportional to the prefactor of dynamic annealing for amorphous pockets.
Units
Square centimeters per second (cm2/s).
Related DADOS mechanisms
Definition
Activation energy for dynamic annealing in amorphous pockets.
Units
Electron-volts (eV).
Related DADOS mechanisms