Atomistic Process Simulation for Microelectronics


Dpt. Electronics.
Univ. Valladolid


Molecular Dynamics

o    Topics

o    Publications

o    Contacts

Kinetic Monte Carlo Process Simulation

·   Introduction

·   Why atomistic KMC-PS

·   DADOS: an Atomistic KMC Process Simulator

o    Help and tutorial for DADOS-UVAS

·   Results

o    Presentations

o    Publications on KMC-PS

o    Scientific publications using KMC-PS

o    Other publications

·   Contacts

Simulation of polycrystalline thin-films

o    Publications

o    Contacts

Binary Collision Approximation

o    Ion Implant Simulator

o    Publications

o    Contacts

Atomistic Process Simulation at e-UVA

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