Atomistic Process
Simulation for Microelectronics
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Dpt.
Electronics.
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o Topics
o Contacts
Kinetic Monte Carlo Process
Simulation
· DADOS:
an Atomistic KMC Process Simulator
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Help and tutorial for DADOS-UVAS
· Results
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Scientific publications using KMC-PS
· Contacts
Simulation of
polycrystalline thin-films
o Contacts
Binary Collision Approximation
o Contacts
Atomistic
Process Simulation at e-UVA
Page maintained by
Pedro.Castrillo@tel.uva.es